Light gauge diffusion cassettes

Light gauge cassettes are composed of light gauge wire that are formed into sinusoidal patterns or spring-type coils. Light gauge refers to the use of smaller diameter wire in the construction of cassettes. This configuration is crucial for precise control and response time of the diffusion process.

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Applications

LPCVD and Low-Temperature Applications: Used when precise control over low temperatures is required. Applications such as LPCVD; polysilicon, nitride, and low-temperature oxide. Atmospheric; H2 anneal, polyimide cure.

Fast Temperature Response Applications: Ideal for processes that demand rapid temperature changes.

Fast Cool Applications: Efficient in applications requiring quick cooling.

A typical low-mass heater consists of:

Half-shell ceramic molds with embedded wire sinuation or spring coils.
Ceramic mold backed with dry blanket fiber for designed insulation value and balanced compression.
Tooled vacuum-formed ceramic vestibule end insulators.
Varieties of thermocouple position clamps.
Ceramic lead locks on internally bussed elements. Power blocks on externally bussed.

Heavy gauge diffusion cassettes

Heavy gauge cassettes are composed of a larger gauge resistance wire that is hot formed into a cylindrical shape and then insulated and encased. These cassettes can have varying numbers of zones and are designed to provide consistent and reliable heating in various applications. Hot coiled with specific and controlled power for inner diameter accuracy and reduced wire stress.

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Horizontal and vertical diffusion cassettes

The choice between horizontal and vertical furnaces depends on various factors, including the specific semiconductor manufacturing processes being employed and the goals of the fabrication facility. Each orientation has its advantages and disadvantages, and the selection may be influenced by factors such as wafer size, process requirements, and the overall manufacturing workflow.