Heavy gauge diffusion cassettes

Heavy gauge cassettes are composed of a larger gauge resistance wire that is formed into a cylindrical shape and then insulated and encased. These cassettes can have varying numbers of zones and are designed to provide consistent and reliable heating in various applications and coiled with specific inner diameter accuracy.

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A typical high-mass heater consists of:

Comb, interlocking, or standard ceramic spacers for wire separation and isolation.
Formed insulation or pre-fired vacuum-formed insulation for coil support and initial insulating layer.
Dry blanket fiber for designed insulation value and balanced compression.
Kanthal® strip material for power leads with ceramic lead locks for added strength and isolation.
Lead bend-backs are positioned to reduce heat loss.
Tooled vacuum-formed ceramic vestibule end insulators.
Varieties of thermocouple position clamps.

Light gauge diffusion cassettes

Light gauge cassettes are composed of light gauge wires that are cold-formed into sinusoidal patterns or spring-type coils. Light gauge refers to the use of thin wires in the construction of cassettes. This configuration is crucial for precise and controlled diffusion of impurities into the semiconductor material.

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Horizontal and vertical diffusion cassettes

The choice between horizontal and vertical furnaces depends on various factors, including the specific semiconductor manufacturing processes being employed and the goals of the fabrication facility. Each orientation has its advantages and disadvantages, and the selection may be influenced by factors such as wafer size, process requirements, and the overall manufacturing workflow.