Diffusion cassettes for crystalline silicon wafer productoin

Kanthal diffusion cassettes cover a wide range of processes, such as:

Fast-cooling applications such as polyimide cure
Atmospheric oxidation
LPCVD nitride

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Here you can find the Kanthal product offering

Fibrothal® diffusion cassettes

In semiconductor manufacturing, the accuracy and control of diffusion processes hinge on the interplay between Fibrothal® light and heavy gauge cassettes.

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Fibrothal® heating modules

Heating modules with metallic heating elements and vacuum-formed ceramic fiber insulation for up to 1,350°C (2,460°F) element temperature.

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High temperature and resistance materials

Our materials products are used for the manufacture of heating elements, thermocouples and a range of highly demanding high temperature applications.

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Diffusion furnaces

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Fibrothal® diffusion cassettes

Fibrothal® heating modules

High temperature and resistance materials